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Chemical Mechanical Polishing as a Contact Problem

 

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Publications:

J. J. Vlassak, "A model for chemical-mechanical polishing of a material surface based on contact mechanics", J. Mech. Phys. Solids 52, 847-873 (2004). (Download)

J. J. Vlassak, "A contact-mechanics based model for dishing and erosion in chemical-mechanical polishing", Mater. Res. Soc. Symp. Proc. 671, M4.6.1 (2001). (Download)

 

 

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Vlassak Contact Information

Contact Information

Joost J. Vlassak

Gordon McKay Professor of Materials Engineering

Pierce Hall 308, 29 Oxford Street   Cambridge, MA 02138

p: 617.496.0424
f:  617.495.9837

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Members

Group Members

Gordon McKay Laboratory, 3rd Floor   9 Oxford Street                                Cambridge, MA 02138

p: 617.496.8145
f:  617.495.9837

Faculty Assistant Contact Information

Faculty Assistant

Rebecca A. Sikora

Pierce Hall 318, 29 Oxford Street   Cambridge, MA 02138

p: 617.496.5368
f:  617.495.9837

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